Apparatus for inspecting bump junction of flip chips and method

Thermal measuring and testing – Leak or flaw detection – With heating or cooling of specimen for test

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Details

25055934, 438 15, 29 2501, G01N 2572, G01J 500

Patent

active

059845228

ABSTRACT:
An apparatus for inspecting bump junctions in a semiconductor flip chip mounting which is able to inspect a state of a junction portion, has a simple structure and is safe and suitable for mass production of semiconductor devices and a method of inspecting the same; in an apparatus for inspecting bump junction in semiconductor flip chip mounting in which a semiconductor bare chip is mounted reversely on a substrate through the bumps, the surface of the semiconductor bare chip is irradiated with a laser light and radiation heat from the heated chip is detected with an infrared camera, a computer acquires temperature distribution on the chip surface from a picture processing unit and analyzes the temperature distribution, thereby to decide the quality of the bump junction state, and decision processing is performed by acquiring data of temperature distribution from a reference semiconductor device of known excellent quality in advance by the same method and comparing with these data.

REFERENCES:
patent: 5052816 (1991-10-01), Nakamura et al.
patent: 5111048 (1992-05-01), Devitt et al.
patent: 5250809 (1993-10-01), Nakata et al.
patent: 5473259 (1995-12-01), Takeda

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