Apparatus for inspecting a disk-like object

Details Apparatus for inspecting a disk-like object Apparatus for inspecting a disk-like object

2006-03-28

2009-02-10

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

07489394

ABSTRACT:
An apparatus for inspecting a disk-like object comprising at least one first module for inspecting a surface of the disk-like object and at least one second module insertable in the apparatus. The at least one second module is arranged to inspect a different element of the disk-like object than the surface of the disk-like object.

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