Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent
1976-10-18
1978-05-02
Camby, John J.
Heating
Work chamber having heating means
Having means by which work is progressed or moved mechanically
432 45, 432258, 148 15, 74801, 165 47, 165 80, 269 57, F27B 914
Patent
active
040872394
ABSTRACT:
An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to semiconductor bodies comprises a liquid-cooled sun gear, a stationary liquid-cooled ring gear coaxial with and radially spaced outwardly from the sun gear, and at least one planet gear disposed between and driven in engagement with the sun and ring gears. Means are provided for supporting a semiconductor body on each of the planet gears while minimizing the conduction of heat from the semiconductor body to the planet gear. Means are also provided for guiding a semiconductor body onto the supporting means and centering the semiconductor body on the planet gear. Thermal distortion of the apparatus is minimized when heated to extreme temperatures making the apparatus ideally suited for processing the semiconductor bodies with heat as in processing by temperature gradient zone melting.
REFERENCES:
patent: 2311942 (1943-02-01), Hagemeyer
patent: 3081648 (1963-03-01), Duer
patent: 3422704 (1969-01-01), Catlett
patent: 3697722 (1972-10-01), Furuichi et al.
patent: 3904442 (1975-09-01), Anthony et al.
patent: 3971875 (1976-07-01), Regalbuto
patent: 4012236 (1977-03-01), Anthony et al.
Anthony Thomas R.
Cline Harvey E.
Camby John J.
Cohen Joseph T.
General Electric Company
Squillaro Jerome C.
Winegar Donald M.
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