Apparatus for generating partially coherent radiation

Details Apparatus for generating partially coherent radiation Apparatus for generating partially coherent radiation

2005-02-22

2005-02-22

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S366000, C359S641000, C359S857000, C359S858000, C378S034000

Reexamination Certificate

active

06859263

ABSTRACT:
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.

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Naulleau, P. et al., “Characterization of the accuracy of EUV phase-shifting point diffraction interferometry”, SPIE. vol. 3331, pp. 114-123.*
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