Apparatus for generating excited and/or ionized particles in...

Details Apparatus for generating excited and/or ionized particles in... Apparatus for generating excited and/or ionized particles in...

2006-06-12

2010-02-23

Vo, Tuyet (Department: 2821)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230VE, C118S724000, C118S720000, C315S111710, C315S111210

Reexamination Certificate

active

07665416

ABSTRACT:
An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.

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