Metal working – Barrier layer or semiconductor device making
Patent
1992-08-13
1994-07-12
Chaudhuri, Olik
Metal working
Barrier layer or semiconductor device making
83 74, 83 768, 83 769, 83368, 83881, 125 2301, B26D 306
Patent
active
053276256
ABSTRACT:
An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.
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World Watch, "Grooved Surface Reported to Improve Efficiency", Sep. 1991, pp. 37-38.
Johansson & Schweitz, "Contact Damage in . . . Microscopy," J. Am. Ceram. Soc., 71(8): 617-623 (1988), month unknown.
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Ahern Brian S.
Clark, Jr. Harry R.
Iseler Gerald W.
Chaudhuri Olik
Massachusetts Institute of Technology
Ojan Ourmazd S.
United States of America
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