Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1998-10-06
2000-11-21
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438708, 438781, H01L 2144
Patent
active
061502650
ABSTRACT:
Semiconductor fabrication methods for processing materials on a semiconductor wafer are disclosed. An exemplary method the semiconductor fabrication apparatus comprises processing a material on a semiconductor assembly during semiconductor fabrication, by the steps of: precleaning a semiconductor assembly in ultraviolet radiation, the step of precleaning performed prior to the step of forming; forming a film in ultraviolet radiation and infrared radiation; annealing the film ultraviolet light radiation and infrared radiation.
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Kilday Lisa
Micro)n Technology, Inc.
Nguyen Tuan H.
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