Apparatus for forming a thin film with a mist forming means

Details Apparatus for forming a thin film with a mist forming means Apparatus for forming a thin film with a mist forming means

1992-05-04

1994-05-31

Jones, W. Gary

Coating apparatus

With vacuum or fluid pressure chamber

118326, 118612, 23921425, 239311, 239224, 505826, 505741, 505734, 505950, 427226, B05C 1104

Patent

active

053165799

ABSTRACT:
A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.

REFERENCES:
patent: 888444 (1908-05-01), Kestner
patent: 2023061 (1935-12-01), Vicard
patent: 3880112 (1975-04-01), Spitz
patent: 4290384 (1981-09-01), Ausschnitt
patent: 4521462 (1985-06-01), Smythe
patent: 4783006 (1988-11-01), Hayashi
patent: 5034372 (1991-07-01), Matsuno
patent: 5041420 (1991-08-01), Nagesh
patent: 5106828 (1992-04-01), Bhargava

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