Apparatus for forming a thin film using an inkjet printing...

Details Apparatus for forming a thin film using an inkjet printing... Apparatus for forming a thin film using an inkjet printing...

2004-11-17

2008-08-12

Do, An H (Department: 2853)

Incremental printing of symbolic information

Ink jet

Medium and processing means

C347S102000

Reexamination Certificate

active

07410251

ABSTRACT:
In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.

REFERENCES:
patent: 4751528 (1988-06-01), Spehrley et al.
patent: 6059406 (2000-05-01), Richtsmeier et al.
patent: 6283589 (2001-09-01), Gelbart

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