Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent
1996-08-26
2000-05-30
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
117202, 117208, 117218, C30B 1528
Patent
active
060686995
ABSTRACT:
The present invention utilizes a weighing detector as well as a weighing diameter-controlling method in a crystal-pulling apparatus using a wire method for measuring the crystal weight in accuracy. A pulling wire 4 and a wire rolling means 20, having a wire rolling drum 21, suspended on a weighing detector 2 in a freely rotating way. Accordingly, in the weighing detector 2, the weights of the pulling wire 4 and the wire rolling means 20 are served to balance the loading weight. In addition, the vertical central line 6 of the weighing detector, the rotating axis of the wire rolling drum 21, the rotating axis of the wire rolling means 20, and the axis of pulling crystals are all consistent. Consequently, the whole gravity center is located on the vertical central line of the weighing detector 2. When pulling the single crystals at the same time as rolling the wire, the gravity center of the wire rolling means is shifted merely depending on the diameter variation at the pulling wire. Therefore, the deviation of the single crystal-pulling axis while rolling the wire rolling means can be decreased. Therefore, it is possible to pull single crystals as well as weigh in a stable manner.
REFERENCES:
patent: 3194637 (1965-07-01), Longini et al.
patent: 4352785 (1982-10-01), Schellin
patent: 4367199 (1983-01-01), Jericho
patent: 5106593 (1992-04-01), Mizuishi et al.
Hiraishi Yoshinobu
Kawabata Mitsunori
Tsuji Hideki
Komatsu Electronic Metals Co. Ltd.
Kunemund Robert
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