Apparatus for evaluating thermal and electrical characteristics

Details Apparatus for evaluating thermal and electrical characteristics Apparatus for evaluating thermal and electrical characteristics

1992-05-06

1993-07-20

Cuchlinski, Jr., William A.

Thermal measuring and testing

Leak or flaw detection

With heating or cooling of specimen for test

374 7, 356237, G01N 2572

Patent

active

052287769

ABSTRACT:
An apparatus is disclosed for evaluating thermal and electrical characteristics of a sample. An intensity modulated pump beam is focused onto the surface of a sample at one spot. A non-modulated probe beam is focused onto the sample at a second spot, spaced laterally and vertically from the first spot. The distance between the two spots is at least two microns. The modulated power of the reflected probe beam that is in phase with the pump beam modulation frequency is monitored to provide information about the characteristics of the sample. The apparatus is particularly useful in evaluating the integrity of metal lines and vias in a semiconductor sample.

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