Coating apparatus – Immersion or work-confined pool type – With tank structure – liquid supply – control – and/or...
Reexamination Certificate
2008-03-11
2008-03-11
Edwards, Laura (Department: 1734)
Coating apparatus
Immersion or work-confined pool type
With tank structure, liquid supply, control, and/or...
C118S423000, C118S428000, C118S719000, C118S050000, C134S084000, C134S088000, C134S902000
Reexamination Certificate
active
07341633
ABSTRACT:
Embodiments of the invention generally provide a fluid processing platform. The platform includes a mainframe having a substrate transfer robot, at least one substrate cleaning cell on the mainframe, and at least one processing enclosure. The processing enclosure includes a gas supply positioned in fluid communication with an interior of the processing enclosure, a first fluid processing cell positioned in the enclosure, a first substrate head assembly positioned to support a substrate for processing in the first fluid processing cell, a second fluid processing cell positioned in the enclosure, a second head assembly positioned to support a substrate for processing in the second fluid processing cell, and a substrate shuttle positioned between the first and second fluid processing cells and being configured to transfer substrates between the fluid processing cells and the mainframe robot.
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Lopatin Sergey
Lubomirsky Dmitry
Pancham Ian A.
Shanmugasundram Arulkumar
Applied Materials Inc.
Edwards Laura
Patterson & Sheridan LLP
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