Apparatus for electro chemical deposition

Details Apparatus for electro chemical deposition Apparatus for electro chemical deposition

2006-02-28

2006-02-28

Phasge, Arun S. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S267000

Reexamination Certificate

active

07005046

ABSTRACT:
A system is provided in which a smaller flow of deposition solution is diverted from a larger flow of deposition solution flowing on an electrochemical deposition tool platform. The smaller flow is diverted to a dosing unit which may be on a separate platform. The dosing unit in one embodiment comprises a pressurized flow line.

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