Apparatus for doping semiconductor rods with solid dopants

Details Apparatus for doping semiconductor rods with solid dopants Apparatus for doping semiconductor rods with solid dopants

1986-05-20

1987-09-29

Pal, Asok

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156620, 156DIG98, 156DIG64, 118900, 422247, 422250, C30B 1310, C30B 1312

Patent

active

046967168

ABSTRACT:
Semiconductor rods are doped in a crucible-free, float-zone enclosure, by the introduction of dopant pellets into the float-zone. The dopant pellets are located in a hopper (7), mounted on the inside of the float-zone enclosure. The introduction of individual dopant pellets is controlled, through an actuating device (12), from the outside of the enclosure.

REFERENCES:
patent: 3908586 (1975-09-01), Sporrer
patent: 3954416 (1976-05-01), Keller
patent: 4270972 (1981-06-01), Crouse
patent: 4556448 (1985-02-01), Kim et al.

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