Gas separation: apparatus – Degasifying means for liquid – With control means responsive to sensed condition
Reexamination Certificate
2006-06-14
2009-12-22
Smith, Duane (Department: 1797)
Gas separation: apparatus
Degasifying means for liquid
With control means responsive to sensed condition
C096S157000, C096S193000, C096S196000, C096S219000, C095S248000, C095S259000, C118S610000
Reexamination Certificate
active
07635410
ABSTRACT:
A photo-resist dispensing apparatus is disclosed and comprises; a tank adapted to hold a photo-resist solution, a pump unit adapted to pump the photo-resist solution from the tank, a filter unit adapted to receive the photo-resist solution from the pump unit, and at least one of a first gas discharge unit connected to the tank and adapted to remove gas bubbles from the photo-resist solution held in the tank, and a second gas discharge unit connected to the filter unit and adapted to remove gas bubbles from the photo-resist solution in the filter.
REFERENCES:
patent: 2420356 (1947-05-01), Compa
patent: 4935151 (1990-06-01), Do
patent: 5262068 (1993-11-01), Bowers et al.
patent: 5527161 (1996-06-01), Bailey et al.
patent: 5857619 (1999-01-01), Huang et al.
patent: 5878918 (1999-03-01), Liao et al.
patent: 5900045 (1999-05-01), Wang et al.
patent: 5912054 (1999-06-01), Tateyama
patent: 5989317 (1999-11-01), Huang et al.
patent: 6071094 (2000-06-01), Yu et al.
patent: 6171367 (2001-01-01), Peng et al.
patent: 6193783 (2001-02-01), Sakamoto et al.
patent: 6332924 (2001-12-01), Shim et al.
patent: 6402821 (2002-06-01), Matsuyama
patent: 6500242 (2002-12-01), Fu et al.
patent: 6554579 (2003-04-01), Martin et al.
patent: 6726774 (2004-04-01), Tzeng et al.
patent: 6733250 (2004-05-01), Yajima
patent: 7018472 (2006-03-01), Yamauchi
patent: 7237581 (2007-07-01), Jang
patent: 2004/0035449 (2004-02-01), Nam
patent: 2004/0144736 (2004-07-01), Yajima
patent: 2004/0163541 (2004-08-01), Hayashi
patent: 2005/0224132 (2005-10-01), Jang
patent: 2002074835 (2002-10-01), None
English machine translation of KR2002074835A.
Park Jin-Jun
Yun Suk-Fill
Samsung Electronics Co,. Ltd.
Smith Duane
Theisen Douglas J
Volentine & Whitt PLLC
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