Apparatus for dispensing photo-resist in semiconductor...

Gas separation: apparatus – Degasifying means for liquid – With control means responsive to sensed condition

Reexamination Certificate

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Details

C096S157000, C096S193000, C096S196000, C096S219000, C095S248000, C095S259000, C118S610000

Reexamination Certificate

active

07635410

ABSTRACT:
A photo-resist dispensing apparatus is disclosed and comprises; a tank adapted to hold a photo-resist solution, a pump unit adapted to pump the photo-resist solution from the tank, a filter unit adapted to receive the photo-resist solution from the pump unit, and at least one of a first gas discharge unit connected to the tank and adapted to remove gas bubbles from the photo-resist solution held in the tank, and a second gas discharge unit connected to the filter unit and adapted to remove gas bubbles from the photo-resist solution in the filter.

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English machine translation of KR2002074835A.

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