Apparatus for directly measuring component values within an RF c

Details Apparatus for directly measuring component values within an RF c Apparatus for directly measuring component values within an RF c

1997-05-23

1999-02-16

Regan, Maura K.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Distributive type parameters

324464, 324 95, 250282, G01R 2726

Patent

active

058724567

ABSTRACT:
Apparatus for directly measuring the value of a component within an RF circuit (e.g., an RF matching network within a semiconductor wafer processing system). Specifically, the apparatus applies a low frequency signal (e.g., a 1 KHz) across one or more of the components within an RF circuit using a bridge circuit that is sufficiently isolated from the RF signal to accomplish accurate measurements of the component. The apparatus monitors the amplitude of the low frequency signal across the component. The amplitude of the low frequency signal is indicative of the value of the component.

REFERENCES:
patent: 4207137 (1980-06-01), Tretola
patent: 5079507 (1992-01-01), Ishida
patent: 5300460 (1994-04-01), Collins
patent: 5467013 (1995-11-01), Williams
patent: 5475319 (1995-12-01), Hirae

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