Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Reexamination Certificate
2005-09-22
2009-08-25
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
Nonelectrical, nonmagnetic, or nonmechanical temperature...
C374S141000, C374S120000
Reexamination Certificate
active
07578616
ABSTRACT:
An apparatus for measuring a temperature of a substrate is disclosed. The apparatus includes a phosphor material in thermal contact to the substrate, the phosphor material producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, the fluorescent response decaying at a decay rate that is related to a temperature of the phosphor material, and the phosphor material producing a first set of non volatile byproducts when exposed to a plasma. The apparatus also includes a barrier window positioned between the phosphor material and a plasma, wherein the barrier window allows at least a portion of the first wavelength and the second wavelength to be transmitted, and wherein the barrier window produces a second set of non volatile byproducts that is less than the first set of non volatile byproducts when exposed to the plasma, wherein when the electromagnetic radiation is transmitted to the phosphor material through the barrier window, the temperature is determined from the decay rate of the fluorescent response.
REFERENCES:
patent: 4437772 (1984-03-01), Samulski
patent: 4448547 (1984-05-01), Wickersheim
patent: 4560286 (1985-12-01), Wickersheim
patent: 4626110 (1986-12-01), Wickersheim et al.
patent: 4652143 (1987-03-01), Heinemann et al.
patent: 4708494 (1987-11-01), Kleinerman
patent: 4752141 (1988-06-01), Sun et al.
patent: 4785824 (1988-11-01), Wickersheim et al.
patent: 4789992 (1988-12-01), Wickersheim et al.
patent: 4859079 (1989-08-01), Wickersheim et al.
patent: 4883354 (1989-11-01), Sun et al.
patent: 4986671 (1991-01-01), Sun et al.
patent: 4988212 (1991-01-01), Sun et al.
patent: 5090818 (1992-02-01), Kleinerman
patent: 5107445 (1992-04-01), Jensen et al.
patent: 5109595 (1992-05-01), Wickersheim et al.
patent: 5110216 (1992-05-01), Wickersheim et al.
patent: 5112137 (1992-05-01), Wickersheim et al.
patent: 5183338 (1993-02-01), Wickersheim et al.
patent: 5304809 (1994-04-01), Wickersheim
patent: 5332316 (1994-07-01), Kleinerman
patent: 5351268 (1994-09-01), Jensen et al.
patent: 5414266 (1995-05-01), Sun
patent: 5470155 (1995-11-01), Jensen
patent: 5600147 (1997-02-01), Jensen
patent: 5775808 (1998-07-01), Pan
patent: 5876119 (1999-03-01), Ishikawa et al.
patent: 6481886 (2002-11-01), Narendmath et al.
patent: 6572265 (2003-06-01), Gotthold et al.
patent: 6616332 (2003-09-01), Renken et al.
patent: 6667527 (2003-12-01), Lue et al.
patent: 7080940 (2006-07-01), Gotthold et al.
patent: 7255474 (2007-08-01), Cong et al.
patent: 2004/0258130 (2004-12-01), Gotthold et al.
patent: 2005/0105103 (2005-05-01), Schietinger et al.
patent: 2006/0140248 (2006-06-01), Gotthold et al.
patent: 2008/0019418 (2008-01-01), Gaff et al.
Feist, J P et al., “Development of the Phosphor Thermometry Technique for Applications in Gas Turbines”, Department of Mechanical Engineering Imperial College of Science Technology and Medicine, 9 Pages, London.
Allison, S.W. et al., “Fiber Optic Temperature Sensor for PEM Fuel Cells”, Power Point Presenation, Oak Ridge National Laboratory U.S. Department of Energy, 16 Pages.
Allison, S.W. et al., “Advances in High Temperature Phosphor Thermometry for Aerospace Applications”, American Institute of Aeronautics and Astronautics, 6 pages.
“Borosilicate Glass Transmission Curve”, http://www.sinclairmfg.com/datasheets/borosilicatecurve.htm.
“Magnesium Fluoride MgF2”, http://www.almazoptics.com/MgF2.htm.
“Controlling Defectivity in Advanced Silicon Etch System”, http://www.micromagazine.com/archive/00/04/richardson.html.
“Crystal Quartz”, http://www.almazoptics.com/quartz.htm.
“Sapphire, AI2O3”, http://www.almazoptics.com/sapphire.htm.
“International Search Report”, date mailed Nov. 6, 2007, International Application No. PCT/US06/35620; Filed on Sep. 12, 2006; Applicants: Lam Research Corporation.
“Written Opinion”, date mailed Nov. 6, 2007, International Application No. PCT/US06/35620; Filed on Sep. 12, 2006; Applicants: Lam Research Corporation.
“International Preliminary Report on Patentability”, Issue in PCT Application No. PCT/US2006/035620; Mailing Date.: Apr. 3, 2008.
Benjamin Neil Martin Paul
Gaff Keith
IP Strategy Group, P.C.
Jagan Mirellys
Lam Research Corporation
Verbitsky Gail
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