Apparatus for detecting information contained in electrons emitt

Details Apparatus for detecting information contained in electrons emitt Apparatus for detecting information contained in electrons emitt

1992-11-12

1994-01-11

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250305, H01J 37252

Patent

active

052784061

ABSTRACT:
An electron detection apparatus detects information contained in electrons emitted from a sample. For the detection of electron, the apparatus uses a probe disposed in close proximity to the sample. The probe has a first side and a second side between which penetrates an aperture, wherein the first side of the probe confronts the sample. A voltage is applied between the probe and the sample. The voltage applied therebetween is set to a such a level that an electric field effect yields on the surface of the sample. Under the electric field effect yielding on the surface of the sample, light or heat is applied to the surface of the sample to emit the electrons from the sample. The electrons thus emitted is detected by entering electrons into the aperture at the first side, passing through the aperture and exiting from the aperture at the second side.

REFERENCES:
patent: 5099117 (1992-03-01), Frohn et al.
patent: 5164594 (1992-11-01), Thompson et al.

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