Apparatus for detecting and centering wafer

Details Apparatus for detecting and centering wafer Apparatus for detecting and centering wafer

1988-10-28

1990-07-31

Rolla, Joseph J.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

414754, 414781, 414783, 901 30, 2941031, B65J 100

Patent

active

049446509

ABSTRACT:
An apparatus for detecting an orientation flat of a wafer and centering the wafer includes a hand base, a pair of guide rollers mounted on the hand base, and a stopper mechanism mounted on the hand base. The hand base is operable to be located in opposed relation to one of opposite faces of the wafer, and has an axis therealong. The guide rollers serve to support the wafer located in opposed relation to the hand base, and are symmetrically disposed with respect to the axis of the hand base. The stopper mechanism cooperates with the pair of guide rollers to center the wafer, and are movable along the axis of the hand base and engageable with the orientation flat of the wafer.

REFERENCES:
patent: 3297134 (1967-01-01), Pastuszak
patent: 3466514 (1969-09-01), Brunner et al.
patent: 3820647 (1974-06-01), Waugh, Jr. et al.
patent: 4483434 (1984-11-01), Miwa et al.
patent: 4639028 (1987-01-01), Olson
patent: 4813732 (1989-03-01), Klem

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