Apparatus for detecting a position of an optical mark

Details Apparatus for detecting a position of an optical mark Apparatus for detecting a position of an optical mark

1995-11-21

2000-10-31

Kim, Robert H.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01N 1100

Patent

active

061411078

ABSTRACT:
The relative positions of an alignment mark on a wafer and index marks on an index plate within an optical system are detected by image processing. The index marks are illuminated by an illuminating light which is independent of an illuminating light for the wafer mark. An image of the wafer mark by a return light from the wafer and images of the index marks by the independent illuminating light are simultaneously picked up by a CCD image pickup device and the position of the first mark is detected from a combined image of these images by image processing.

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