Apparatus for automated pillar layout and method for implementin

Details Apparatus for automated pillar layout and method for implementin Apparatus for automated pillar layout and method for implementin

1997-04-22

2000-01-11

Picardat, Kevin M.

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

438 14, 438128, G01R 3126, H01L 2166

Patent

active

060135360

ABSTRACT:
Disclosed is a method for automating support pillar design in air dielectric interconnect structures. The method includes selecting features having an interconnect dimension from a first mask. Providing an intermediate support pattern defining a pillar spacing. Identifying overlap regions where the features selected from the first mask overlap the intermediate support pattern. The method further including filtering the overlap regions to eliminate features that are less than the interconnect dimension. The filtering being configured to define discrete pillar locations associated with the first mask.

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