Apparatus for and method of sealing shafts in crystal-growing fu

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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422249, C30B 1530

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active

044067313

ABSTRACT:
An apparatus for and a method of sealing a rotating shaft in a crystal-growing furnace, wherein the crystal-growing furnace includes a chamber adapted to be maintained at a contaminant-free inert atmosphere, with an inert gas at a low pressure, a rotatable shaft element which extends into the chamber, and a seal surrounding the shaft element, to separate the atmospheric pressure outside of the chamber from the low-pressure, contaminant-free atmosphere within the chamber, the seal having a plurality of sealing elements spaced apart along the shaft and defining an annular cavity between the sealing elements, the improvement which comprises means to and a method of maintaining an inert-gas atmosphere within the sealed cavity at a pressure slightly higher than the outside atmospheric pressure or the low pressure of the chamber, whereby, on failure of the sealing elements, inert gas passes from the cavity to the atmosphere or to the low-pressure chamber, thereby preventing the contamination of the chamber with atmospheric air.

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patent: 3514114 (1970-05-01), Monahan
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patent: 4097329 (1978-06-01), Stock et al.
patent: 4174843 (1979-11-01), Arena et al.
patent: 4189157 (1980-02-01), Mahan et al.
patent: 4284605 (1981-08-01), Pierrat
patent: 4300772 (1981-11-01), Nissel
Webster's New World Dictionary, World Pub. Co., N. Y., College Edition, 1968, p. 751.

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