Apparatus for aligning wafers within a semiconductor wafer casse

Details Apparatus for aligning wafers within a semiconductor wafer casse Apparatus for aligning wafers within a semiconductor wafer casse

1991-06-17

1992-09-22

Spar, Robert J.

Material or article handling

Device for emptying portable receptacle

With jarring means

211 41, 414DIG4, 206334, 206454, B65G 6530

Patent

active

051492440

ABSTRACT:
An improvement which allows precise positioning of wafers within cassettes in preparation for removal of the wafers by automated equipment. The improvement includes mounting two sawtooth jigs upon the surface upon which the cassette tray is to be placed which extend up into the cassette. Wafers within the cassette rest within the precisely aligned grooves of the sawtooth jigs.

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