Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction
Patent
1988-07-21
1990-04-10
Straub, Gary P.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Including specific material of construction
156601, 156608, 1566171, 422248, C30B 1570, C30B 1530, C30B 1500, C30B 1526
Patent
active
049157752
ABSTRACT:
A melt-surface initial position adjusting apparatus which is suitable for use in a monocrystal growing system employing the Czochralski method to adjust the vertical position of the melt surface before the growing of a monocrystal. The apparatus can ensure a highly precise measurement of a crystal-diameter measuring device, thereby enabling a reduction in the costs of producing a monocrystal bar. Before the growing of a crystal, the vertical position (H) of the surface (16A) of a melt within a crucible is measured. The crucible is moved vertically on the basis of the measured value in such a manner as to maintain the distance (L) between the melt surface (16A) and an image sensor (28) for measuring the crystal diameter at a predetermined value.
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Toshiba, "System for Pulling Up Single Crystal", Patent Abstracts of Japan, vol. 11, No. 297, (Sep. 25, 1987).
Fujitsu, "Single Crystal Growing Apparatus", Patent Abstracts of Japan, vol. 8, No. 134, (Jun. 21, 1984).
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Hirano Yoshihiro
Katsuoka Nobuo
Ozaki Atsushi
Tomita Munenori
Franklin M.
Shin-Etsu Handotai Company, Ltd.
Straub Gary P.
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