Apparatus for achieving mechanical and thermal isolation of port

Details Apparatus for achieving mechanical and thermal isolation of port Apparatus for achieving mechanical and thermal isolation of port

1995-10-12

1996-12-10

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

257420, 257676, 257704, H01L 2302, H01L 2982, H01L 23495

Patent

active

055833730

ABSTRACT:
A preferred embodiment of an integrated semiconductor device includes a semiconductor die having a hole therethrough. A paddle member includes a handle member connected between the paddle member and the semiconductor die to suspend the paddle member in the hole. A cap layer is bonded to the semiconductor die to completely cover the hole, the paddle member, and the handle member. The second surface of the semiconductor die is bonded to the lead frame. A preferred embodiment of a method of manufacturing an integrated semiconductor device includes the steps of: forming a semiconductor die having a paddle area for isolating sensitive circuitry and an unoccupied area which substantially surrounds the paddle area except for a handle area, forming a trench in the unoccupied area, covering the paddle area, the trench, and the handle area with a sacrificial spacer material, covering the sacrificial spacer material with a cap layer, etching the semiconductor die beneath the paddle area and the trench until the handle area suspends the paddle area within a hole formed in the semiconductor die, and bonding the second surface of the semiconductor die to a lead frame.

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