Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1994-10-19
1997-12-16
Font, Frank G.
Optics: measuring and testing
By particle light scattering
With photocell detection
356353, 356358, G01B 902
Patent
active
056991584
ABSTRACT:
A laser beam produced from a laser source is divided into two divisional beams (plane waves) by the half mirror of a prism unit, and the two divisional beams are reflected by the two inclined surfaces of the prism unit, whereafter they intersect each other and create a composite wave (interference fringes) by interference. A two-division pin photodiode moving with a moving object detects the light intensity of the resulting composite wave, and measures the displacement of the moving object in a direction orthogonal to the direction of movement thereof on the basis of a variation in the detected intensity.
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patent: 5355220 (1994-10-01), Kobayashi et al.
Naess, "A measuring Interferometer for high Accuracy alignment", Nov. 1968, Applied Optics Vol. 7 No. 11, pp. 2315-2317.
N. Ikawa, et al., "Laser Beam as a Straight Datum and its Application to Straightness Measurement at Nanometer Level.", Annals of the CIRP, pp. 523-526, vol. 37, No. 1 (1988). (no month available).
Canon Kabushiki Kaisha
Font Frank G.
Kim Robert
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