Apparatus for abatement of by-products generated from...

Details Apparatus for abatement of by-products generated from... Apparatus for abatement of by-products generated from...

2006-04-21

2009-02-24

Johnson, Edward M (Department: 1793)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

C422S168000

Reexamination Certificate

active

07494628

ABSTRACT:
Method and apparatus for abating F2from by-products generated during cleaning of a processing chamber. F2abatement is efficiently performed by directly injecting H2in line with a foreline exiting the processing chamber. A tube which is highly resistant to oxidation and corrosive gases, even at high temperature, is connected in line with the foreline as part of the exhaust line of the processing chamber. A cooling jacket may be provided for cooling the tube, since the reaction between F2and H2is exothermic. A pressure monitoring arrangement may also be employed to insure that pressure within a hydrogen line, that feeds the injection of H2into the tube, does not exceed a predetermined pressure value.

REFERENCES:
patent: 5129958 (1992-07-01), Nagashima et al.
patent: 5632821 (1997-05-01), Doi
patent: 5759237 (1998-06-01), Li et al.
patent: 5851293 (1998-12-01), Lane et al.
patent: 5900288 (1999-05-01), Kuhman et al.
patent: 5955037 (1999-09-01), Holst et al.
patent: 6060397 (2000-05-01), Seamons et al.
patent: 6089472 (2000-07-01), Carter
patent: 6099649 (2000-08-01), Schmitt et al.
patent: 6106790 (2000-08-01), Hsiung et al.
patent: 6109206 (2000-08-01), Maydan et al.
patent: 6187072 (2001-02-01), Cheung et al.
patent: 6350697 (2002-02-01), Richardson et al.
patent: 6468490 (2002-10-01), Shamouilian et al.
INCONEL ® 601, http://www.c276.com/DataSheets/601.htm, Oct. 2, 2000.

Affiliated with

Also associated with

Rating

Apparatus for abatement of by-products generated from... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for abatement of by-products generated from..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for abatement of by-products generated from... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4086460