Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2007-06-12
2007-06-12
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Detector detail
C073S031060, C073S204230
Reexamination Certificate
active
10758825
ABSTRACT:
A gas detector for detecting a fluoro gas species in a gaseous environment containing same, e.g., an effluent from a semiconductor processing tool that employs corrosive fluoro species such as HF, NF3, etc. for etch cleaning. The gas detector preferably employs an elongated nickel-containing gas sensor element that can be vertically mounted on a fluoro-resistant support structure. Since the nickel-containing gas sensor element is sensitive to the fluoro species and is also electrically conductive, it can function both as a sensing component and a heat source when elevated temperature sensing is required. Vertical mounting of such elongated gas sensor element on the support structure significantly improves the signal strength, reduces the response time, minimizes the footprint of the gas detector, and provides structural flexibility for accommodating thermal expansion/contraction of the elongated gas sensor element.
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Chen Ing-Shin
Chen Philip S. H.
Dimeo, Jr. Frank
Neuner Jeffrey W.
Roeder Jeffrey F.
Advanced Technology & Materials Inc.
Gustafson Vincent K.
Intellectual Property / Technology Law
Saint-Surin Jacques M.
Williams Hezron
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