Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-01-30
2007-01-30
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Work support
C118S728000, C118S729000, C156S345510, C156S345520, C156S345530, C156S345540, C156S345550
Reexamination Certificate
active
10769549
ABSTRACT:
A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the rotational shaft to form a passage, a retaining member is removably inserted to engage both the socket opening and the shaft indentation. Methods of rotating a substrate while minimizing rotational slippage of the substrate holder support with respect to the shaft are also provided.
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Barnett Lewis C.
Halpin Michael W.
Jacobs Loren R.
Weeks Thomas M.
Wood Eric R.
ASM America Inc.
Dhingra Rakesh
Hassanzadeh Parviz
Knobbe Martens Olson & Bear LLP
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