Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2011-01-25
2011-01-25
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
07876440
ABSTRACT:
Disclosed are apparatus and methods for determining overlay between a plurality of first structures in a first layer of a sample and a plurality of second structures in a second layer of the sample. Targets A, B, C and D that each include a portion of the first and second structures are provided. The target A is designed to have an offset Xa between its first and second structures portions; the target B is designed to have an offset Xb between its first and second structures portions; the target C is designed to have an offset Xc between its first and second structures portions; and the target D is designed to have an offset Xd between its first and second structures portions. Each of the offsets Xa, Xb, Xc and Xd is different from zero, and Xa is an opposite sign and differ from Xb.
REFERENCES:
patent: 3594085 (1971-07-01), Wilmanns
patent: 4103998 (1978-08-01), Nakazawa et al.
patent: 4167337 (1979-09-01), Jaerisch et al.
patent: 4200395 (1980-04-01), Smith et al.
patent: 4332473 (1982-06-01), Ono
patent: 4631416 (1986-12-01), Trutna, Jr.
patent: 4647207 (1987-03-01), Bjork
patent: 4703434 (1987-10-01), Brunner
patent: 4710642 (1987-12-01), McNeil
patent: 4750836 (1988-06-01), Stein
patent: 4757207 (1988-07-01), Chappelow et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4820055 (1989-04-01), Mueller
patent: 4828392 (1989-05-01), Nomura et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4929083 (1990-05-01), Brunner
patent: 4999014 (1991-03-01), Gold et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5114235 (1992-05-01), Suda et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5172190 (1992-12-01), Kaiser
patent: 5182455 (1993-01-01), Muraki
patent: 5182610 (1993-01-01), Shibata
patent: 5189494 (1993-02-01), Muraki
patent: 5191393 (1993-03-01), Hignette et al.
patent: 5276337 (1994-01-01), Starikov
patent: 5316984 (1994-05-01), Leourx
patent: 5327221 (1994-07-01), Saitoh et al.
patent: 5340992 (1994-08-01), Matsugu et al.
patent: 5343292 (1994-08-01), Brueck et al.
patent: 5355306 (1994-10-01), Waldo
patent: 5388909 (1995-02-01), Johnson et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5416588 (1995-05-01), Ducharme et al.
patent: 5438413 (1995-08-01), Mazor et al.
patent: 5465148 (1995-11-01), Matsumoto et al.
patent: 5525840 (1996-06-01), Tominaga
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5596413 (1997-01-01), Stanton et al.
patent: 5608526 (1997-03-01), Pinwonka-Corle et al.
patent: 5657129 (1997-08-01), Nishi
patent: 5666196 (1997-09-01), Ishii et al.
patent: 5712707 (1998-01-01), Ausschnitt et al.
patent: 5783342 (1998-07-01), Yamashita et al.
patent: 5801390 (1998-09-01), Shiraishi
patent: 5805290 (1998-09-01), Ausschnitt et al.
patent: 5808742 (1998-09-01), Everett et al.
patent: 5883710 (1999-03-01), Nikoonahad et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5909333 (1999-06-01), Best et al.
patent: 5912983 (1999-06-01), Hiratsuka
patent: 5923041 (1999-07-01), Cresswell et al.
patent: 5966201 (1999-10-01), Shiraishi et al.
patent: 6013355 (2000-01-01), Chen et al.
patent: 6023338 (2000-02-01), Bareket
patent: 6046094 (2000-04-01), Jost et al.
patent: 6077756 (2000-06-01), Lin et al.
patent: 6079256 (2000-06-01), Bareket
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6128089 (2000-10-01), Ausschnitt et al.
patent: 6153886 (2000-11-01), Hagiwara et al.
patent: 6160622 (2000-12-01), Dirksen et al.
patent: 6165656 (2000-12-01), Tomimatu
patent: 6177330 (2001-01-01), Yasuda
patent: 6197679 (2001-03-01), Hattori
patent: 6255189 (2001-07-01), Muller et al.
patent: 6323560 (2001-11-01), Narimatsu et al.
patent: 6342735 (2002-01-01), Colelli et al.
patent: 6350548 (2002-02-01), Leidy et al.
patent: 6420791 (2002-07-01), Huang et al.
patent: 6420971 (2002-07-01), Leck et al.
patent: 6421124 (2002-07-01), Matsumoto et al.
patent: 6445453 (2002-09-01), Hill
patent: 6458605 (2002-10-01), Stirton
patent: 6462818 (2002-10-01), Bareket
patent: 6476920 (2002-11-01), Scheiner et al.
patent: 6486954 (2002-11-01), Mieher et al.
patent: 6522406 (2003-02-01), Rovira et al.
patent: 6590656 (2003-07-01), Xu et al.
patent: 6611330 (2003-08-01), Lee et al.
patent: 6633831 (2003-10-01), Nikoonahad et al.
patent: 6650424 (2003-11-01), Brill et al.
patent: 6699624 (2004-03-01), Niu et al.
patent: 6713753 (2004-03-01), Rovira et al.
patent: 6767680 (2004-07-01), Schulz
patent: 6772084 (2004-08-01), Bischoff et al.
patent: 6813034 (2004-11-01), Rosencwaig et al.
patent: 6815232 (2004-11-01), Jones et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 6867870 (2005-03-01), Mihaylov et al.
patent: 6888632 (2005-05-01), Smith
patent: 6900892 (2005-05-01), Shchegrov et al.
patent: 6919964 (2005-07-01), Chu
patent: 6949462 (2005-09-01), Yang et al.
patent: 6982793 (2006-01-01), Yang et al.
patent: 6985229 (2006-01-01), Lee et al.
patent: 6992764 (2006-01-01), Yang et al.
patent: 7042569 (2006-05-01), Sezginer et al.
patent: 7046361 (2006-05-01), Yang et al.
patent: 7046376 (2006-05-01), Sezginer
patent: 7061615 (2006-06-01), Lowe-Webb
patent: 7061623 (2006-06-01), Davidson
patent: 7061627 (2006-06-01), Opsal et al.
patent: 7065737 (2006-06-01), Phan et al.
patent: 7080330 (2006-07-01), Choo et al.
patent: 7193715 (2007-03-01), Smedt et al.
patent: 7242477 (2007-07-01), Mieher et al.
patent: 7280212 (2007-10-01), Mieher et al.
patent: 7280230 (2007-10-01), Shchegrov et al.
patent: 7283226 (2007-10-01), Hasan
patent: 7289213 (2007-10-01), Mieher et al.
patent: 7298481 (2007-11-01), Mieher et al.
patent: 7301634 (2007-11-01), Mieher et al.
patent: 7317531 (2008-01-01), Mieher et al.
patent: 7379183 (2008-05-01), Mieher et al.
patent: 7385699 (2008-06-01), Mieher et al.
patent: 7433040 (2008-10-01), Mieher et al.
patent: 7564557 (2009-07-01), Mieher et al.
patent: 7663753 (2010-02-01), Mieher et al.
patent: 2002/0054290 (2002-05-01), Vurens et al.
patent: 2002/0072001 (2002-06-01), Brown et al.
patent: 2002/0093648 (2002-07-01), Nikoonahad et al.
patent: 2002/0135875 (2002-09-01), Niu et al.
patent: 2002/0149782 (2002-10-01), Raymond
patent: 2002/0158193 (2002-10-01), Sezginer et al.
patent: 2002/0192577 (2002-12-01), Fay et al.
patent: 2003/0002043 (2003-01-01), Abdulhalim et al.
patent: 2003/0011786 (2003-01-01), Levy et al.
patent: 2003/0020184 (2003-01-01), Ballarin
patent: 2003/0156276 (2003-08-01), Bowes
patent: 2003/0223630 (2003-12-01), Adel et al.
patent: 2004/0066517 (2004-04-01), Huang et al.
patent: 2004/0129900 (2004-07-01), Den Boef et al.
patent: 2004/0233440 (2004-11-01), Mieher et al.
patent: 2004/0233442 (2004-11-01), Mieher et al.
patent: 2005/0012928 (2005-01-01), Sezginer et al.
patent: 2005/0122516 (2005-06-01), Sezginer et al.
patent: 2005/0157297 (2005-07-01), Abdulhalim et al.
patent: 2005/0286051 (2005-12-01), Sezginer et al.
patent: 2006/0050283 (2006-03-01), Hill
patent: 2006/0193630 (2006-08-01), Dishon et al.
patent: 2007/0105029 (2007-05-01), Ausschnitt
patent: 2008/0024766 (2008-01-01), Mieher et al.
patent: 2008/0049226 (2008-02-01), Mieher et al.
patent: 2008/0094630 (2008-04-01), Mieher et al.
patent: 1400855 (2004-03-01), None
patent: 60-126881 (1986-07-01), None
patent: 63-248804 (1988-10-01), None
patent: 02-112709 (1990-04-01), None
patent: 03-003224 (1991-01-01), None
patent: 9-153021 (1997-06-01), None
patent: 10-162130 (1998-06-01), None
patent: 10-282008 (1998-10-01), None
patent: 11-86332 (1999-03-01), None
patent: 11-304719 (1999-11-01), None
patent: 2001-093822 (2001-04-01), None
patent: WO 85/04266 (1985-09-01), None
patent: WO 95/02200 (1995-01-01), None
patent: WO 99/45340 (1999-09-01), None
patent: WO 99/56174 (1999-11-01), None
patent: WO 01/84382 (2001-11-01), None
patent: WO 01/97279 (2001-12-01), None
patent: WO 02/15238 (2002-02-01), None
patent: WO 02/18871 (2002-03-01), None
patent: WO 02/25708 (2002-03-01), None
patent: WO 02/25723 (2002-03-01), None
patent: WO 02/35300 (2002-05-01), None
patent: WO 02/50509 (2002-06-01), None
patent: WO 02/065545 (2002-08-01), None
patent: WO 02/065545 (2002-08-01), None
patent: WO 02/069390 (2002-09-01), None
patent: WO 02/084213 (2002-10-01),
Adel Michael E.
Fabrikant Anatoly
Friedmann Michael
Golovanesky Boris
Levy Ady
Chowdhury Tarifur
KLA-Tencor Technologies Corporation
Stock, Jr. Gordon J
Weaver Austin Villeneuve & Sampson LLP
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