Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture
Reexamination Certificate
2011-08-23
2011-08-23
Smith, Duane (Department: 1776)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
C422S168000, C422S169000, C422S171000, C422S172000, C422S173000, C422S174000, C422S177000, C422S198000, C422S207000, C431S005000
Reexamination Certificate
active
08003067
ABSTRACT:
An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
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Brown Daniel S.
Correa Rene T.
Crawford Shaun W.
Curry Mark W.
Fox Allen
Applied Materials Inc.
Dugan & Dugan PC
Pham Minh-Chau
Smith Duane
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