Wave transmission lines and networks – Coupling networks – With impedance matching
Reexamination Certificate
2005-07-11
2009-08-04
Lee, Benny (Department: 2817)
Wave transmission lines and networks
Coupling networks
With impedance matching
C315S111210, C315S111710
Reexamination Certificate
active
07570130
ABSTRACT:
In certain embodiments, an apparatus for providing a fixed impedance transformation network for driving a plasma chamber includes a pre-match network adapted to couple between an Active RF match network and a plasma chamber load associated with the plasma chamber. The pre-match network includes (1) a first capacitive element; (2) an inductive element connected in parallel with the first capacitive element to form a parallel circuit that presents a stepped-up impedance to an output of the Active RF match network such that a voltage required to drive the plasma chamber load is reduced; and (3) a second capacitive element coupled to the parallel circuit and adapted to couple to the plasma chamber load. The second capacitive element reduces or cancels at least in part a reactance corresponding to an inductance associated with the plasma chamber load. Numerous other aspects are provided.
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Anwar Suhail
Sorensen Carl A.
White John M.
Applied Materials Inc.
Dugan & Dugan PC
Lee Benny
Stevens Gerald
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