Apparatus and method of making a self-aligned integrated resisto

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257 57, 257347, 257537, H01L 2976, H01L 2994, H01L 31062, H01L 3143

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058641629

ABSTRACT:
A thin silicon layer transistor integrated with a resistor. The resistor is self-aligned and contiguous with the transistor and is also formed of the same thin silicon layer as the transistor. This structure is particularly suitable for an SRAM circuit in order to simplify processing steps and to conserve area on SOS designs.

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