Apparatus and method of dispensing photosensitive solution...

Fluent material handling – with receiver or receiver coacting mea – Multiple passage filling means for diverse materials or flows – With baffle – spreader – displacer – drip ring – filter or screen

Reexamination Certificate

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Details

C141S067000, C141S094000, C096S175000, C417S026000

Reexamination Certificate

active

11045062

ABSTRACT:
A method of and apparatus for dispensing photosensitive solution substantially reduces the amount of air bubbles in the photosensitive solution during the dispensing operation. The photosensitive solution dispensing apparatus includes at least one supply vessel that contains the solution, a respective buffer tank that buffers the solution supplied from each supply vessel, a filter unit for filtering the solution, a pump for pumping the solution pumped from the buffer tank to the filter unit, a dispensing nozzle connected to the filter unit, and a dedicated bubble removal filter that is interposed between the buffer tank and the pump. The bubble removal filter is configured to remove air bubbles from the solution before the solution flows into the pump and is dispensed through the nozzle.

REFERENCES:
patent: 4153902 (1979-05-01), Kanayama
patent: 5814151 (1998-09-01), Lee et al.
patent: 6355105 (2002-03-01), Tuan
patent: 6402821 (2002-06-01), Matsuyama
patent: 7029238 (2006-04-01), Zagars et al.
patent: 2004/0011285 (2004-01-01), Tzeng et al.

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