Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2006-08-22
2006-08-22
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
C034S092000
Reexamination Certificate
active
07093375
ABSTRACT:
An apparatus for processing a substrate is provided which includes a proximity head proximate to a surface of the substrate when in operation. The apparatus also includes an opening on a surface of the proximity head to a cavity defined in the proximity head where the cavity delivers an active agent to the surface of the substrate through the opening. The apparatus further includes a plurality of conduits on the surface of the proximity head that generates a fluid meniscus on the surface of the substrate surrounding the opening.
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Gravini S.
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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