Apparatus and method for transformation of substrate

Details Apparatus and method for transformation of substrate Apparatus and method for transformation of substrate

2005-02-18

2009-11-17

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

C438S483000, C438S798000

Reexamination Certificate

active

07618880

ABSTRACT:
A method is disclosed for forming a layer of a wide bandgap material in a non-wide bandgap material. The method comprises providing a substrate of a non-wide bandgap material and converting a layer of the non-wide bandgap material into a layer of a wide bandgap material. An improved component such as wide bandgap semiconductor device may be formed within the wide bandgap material through a further conversion process.

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