Apparatus and method for transferring heat from a hot electrosta

Details Apparatus and method for transferring heat from a hot electrosta Apparatus and method for transferring heat from a hot electrosta

Filed on

1996-02-23

Date issued

1998-03-24

Examiner

Bueker, Richard

Patent Class

Coating apparatus

SubClass

Gas or vapor deposition

SubSubClass

With treating means

Other Related Categories

118723E, 118724, 118725, 118728, 156345, 29 2501, C23C 1600

Type

Patent

Status

active

Patent number

057308039

Description

ABSTRACT:
The present invention discloses an apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold plate. Further, the overall structure of the electrostatic chuck in combination with the heat transfer apparatus of the present invention permits the thermal and pressure isolation of the high-temperature, vacuum process chamber containing the work piece processing surface of the electrostatic chuck from the low-temperature, atmospheric pressured heat transfer apparatus of the present invention.
In a preferred embodiment of the heat transfer apparatus, the apparatus comprises: an electrostatic chuck body having a buried electrode for high voltage DC and RF electrical input and a buried heating element, whereby the electrostatic chuck can be heated; a controlled heat transfer apparatus, including a heat transfer plate having a first surface in thermal contact with the electrostatic chuck body and a second surface in contact with at least one heat transfer thermal well; a cold body in thermal contact with the at least one heat transfer thermal well; and a thermal grease between the thermal well and the cold body.

REFERENCES:
patent: 5350479 (1994-09-01), Collins

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