Apparatus and method for thermally isolating a heat chamber

Details Apparatus and method for thermally isolating a heat chamber Apparatus and method for thermally isolating a heat chamber

2007-04-24

2007-04-24

Moore, Karla (Department: 1763)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C156S345310, C156S345320, C414S150000, C414S172000, C414S222070, C414S939000, C432S245000

Reexamination Certificate

active

10736196

ABSTRACT:
An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.

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