Apparatus and method for testing semiconductor chip

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S765010

Reexamination Certificate

active

07420382

ABSTRACT:
An apparatus includes a test board for testing electrical characteristics of the semiconductor chip; socket pins vertically disposed on the test board to electrically connect the test board, and external terminals of the semiconductor chip; socket springs interposed between the socket pins and the test board and making the socket pins vertically elastic; a plurality of laser beam transmitters vertically penetrating the socket pins, the socket springs, and the test board; and a laser beam source supplying laser beams to the laser beam transmitters.

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patent: 5272310 (1993-12-01), Daikuzono
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patent: 6559665 (2003-05-01), Barabi
patent: 6573702 (2003-06-01), Marcuse et al.
patent: 6957005 (2005-10-01), Saulnier et al.
patent: 2002-164136 (2002-06-01), None
patent: 2002-228682 (2002-08-01), None
patent: 2002-257983 (2002-09-01), None
patent: 11-101840 (1999-04-01), None
patent: 2002-73820 (2002-09-01), None
English language sbstract of Korean Publication No. 2002-73820.
English language abstract of Japanese Publication No. 2002-228682.
English language abstract of Japanese Publication No. 2002-257893.

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