Apparatus and method for testing an inker of the semiconductor w

Details Apparatus and method for testing an inker of the semiconductor w Apparatus and method for testing an inker of the semiconductor w

1998-07-29

2000-04-11

Ballato, Josie

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324759, 3461401, G01R 3102

Patent

active

060492031

ABSTRACT:
An inker test apparatus is provided for use with a wafer probe station. The test apparatus includes a plurality of movable parts which allow positioning of the inker adjacent the wafer area. Sensors are provided adjacent the inker solenoid and the inkline of the inker. A control panel has keys for selecting parameters of the solenoid operation number and time and for displaying the tests results. Also, a controller responds to the input parameters from the control panel to produce a corresponding solenoid drive signal. The controller also detects malfunction of the solenoid and inkline based on the output signals from the solenoid sensor and inkline sensor. Further, a power supply is provided for generating suitable operating voltage for the inker solenoid.

REFERENCES:
patent: 4390885 (1983-06-01), Shah et al.
patent: 4568879 (1986-02-01), Nakamura et al.
patent: 4992729 (1991-02-01), Nadeau

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