Apparatus and method for synthesizing spherical diamond...

Coating apparatus – Gas or vapor deposition – With treating means

Reexamination Certificate

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C118S715000, C118S7230AN, C118S7230MP, C118S724000, C118S725000, C118S728000

Reexamination Certificate

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06907841

ABSTRACT:
Disclosed are an apparatus and a method to synthesize powders typed diamond with the size between several tens nm to several μm in diameter using conventional CVD processes for deposition of diamond films. Gas phase nucleation has been induced on the boundary of plasmas, and as a result the spherical diamond powders accumulated have been obtained on circumferences of the normal substrate. With a modification of a substrate structure, a large area accumulation of the diamond powders of around 100 mm in diameter has been accomplished.

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