Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2005-06-21
2005-06-21
Lund, Jeffrie R. (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S715000, C118S7230AN, C118S7230MP, C118S724000, C118S725000, C118S728000
Reexamination Certificate
active
06907841
ABSTRACT:
Disclosed are an apparatus and a method to synthesize powders typed diamond with the size between several tens nm to several μm in diameter using conventional CVD processes for deposition of diamond films. Gas phase nucleation has been induced on the boundary of plasmas, and as a result the spherical diamond powders accumulated have been obtained on circumferences of the normal substrate. With a modification of a substrate structure, a large area accumulation of the diamond powders of around 100 mm in diameter has been accomplished.
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Baik Young-Joon
Eun Kwang yong
Lee Jae-Kap
Korea Institute of Science and Technology
Lund Jeffrie R.
Scully Scott Murphy & Presser
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