Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-05-09
2011-11-15
Huson, Gregory (Department: 3751)
Coating apparatus
Gas or vapor deposition
Work support
C141S082000, C406S088000
Reexamination Certificate
active
08057601
ABSTRACT:
An apparatus and method for supporting, positioning and rotating a substrate are provided. In one embodiment, a support assembly for supporting a substrate includes an upper base plate and a lower base plate. The substrate is floated on a thin layer of air over the upper base plate. A positioning assembly includes a plurality of air bearing edge rollers or air flow pockets used to position the substrate in a desired orientation inside above the upper base plate. A plurality of slanted apertures or air flow pockets are configured in the upper base plate for flowing gas therethrough to rotate the substrate to ensure uniform heating during processing.
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Koelmel Blake
Lerner Alexander N.
Ranish Joseph M.
Sangam Kedarnath
Sorabji Khurshed
Applied Materials Inc.
Huson Gregory
Niesz Jason
Patterson & Sheridan L.L.P.
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