Electric resistance heating devices – Heating devices – Radiant heater
Patent
1991-02-06
1993-01-12
Reynolds, Bruce A.
Electric resistance heating devices
Heating devices
Radiant heater
392416, 219405, 118725, C23C 1648, H05B 300, F24C 706
Patent
active
051796775
ABSTRACT:
A reflector array employs a number of linear, tubular heater lamps arranged in a circle concentric with the substrate to be heated. Some of the lamps have focusing reflectors and the remainder have dispersive reflectors. A peripheral cylindrical reflector surrounds the lamps and their associated reflectors. The combined reflectors permit balancing the thermal radiation intensity across the surface of the substrate.
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Anderson Roger N.
Carlson David K.
Deacon Thomas E.
Applied Materials Inc.
Hentzel Paul
Jeffery John A.
Meads Robert R.
Reynolds Bruce A.
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