Apparatus and method for substrate heating utilizing various inf

Electric resistance heating devices – Heating devices – Radiant heater

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Details

392416, 219405, 118725, C23C 1648, H05B 300, F24C 706

Patent

active

051796775

ABSTRACT:
A reflector array employs a number of linear, tubular heater lamps arranged in a circle concentric with the substrate to be heated. Some of the lamps have focusing reflectors and the remainder have dispersive reflectors. A peripheral cylindrical reflector surrounds the lamps and their associated reflectors. The combined reflectors permit balancing the thermal radiation intensity across the surface of the substrate.

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