Apparatus and method for substrate electroless plating

Details Apparatus and method for substrate electroless plating Apparatus and method for substrate electroless plating

2011-01-25

2011-01-25

Edwards, Laura (Department: 1713)

Coating apparatus

Immersion or work-confined pool type

With means for moving work through, into or out of pool

C118S428000, C118S429000, C118S500000

Reexamination Certificate

active

07874260

ABSTRACT:
A body structure has an inner region shape that defines a cavity within the body structure. The cavity within the body structure is designed to hold a fluid. A chuck includes a top that is capable of holding a substrate, and a body portion that has a complementary shape with respect to the inner region shape of the body structure. The complementary shape of the chuck body portion at least partially aligns with the inner region shape that defines the body structure cavity. The chuck body portion is designed to move into the cavity of the body structure and displace the fluid held within the cavity, so as to shift the fluid over the top of the chuck. The body portion of the chuck is also designed to move out of the cavity of the body structure, so as to remove the fluid from over the top of the chuck.

REFERENCES:
patent: 5368645 (1994-11-01), Bok
patent: 5571367 (1996-11-01), Nakajima et al.
patent: 5921560 (1999-07-01), Moshtagh
patent: 6558518 (2003-05-01), Sendai et al.
patent: 2004/0097071 (2004-05-01), Ivanov et al.

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