Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-03-29
2011-03-29
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C356S400000
Reexamination Certificate
active
07916271
ABSTRACT:
Disclosed is a method and apparatus which are arranged to detect magnitude of correlation between (i) an explanatory variable corresponding to operation data related to an operation made by an exposure apparatus for exposing a substrate, and (ii) a response variable corresponding to inspection data related to a result of inspection made to the substrate after the same is exposed, the magnitude of correlation between the explanatory variable and the response variable being detected with respect to each of different combinations of operation data pieces, and also arranged to specify, on the basis of detected correlation magnitudes and with respect to one of the different combinations of operation data pieces, a category of the operation data and the correlation between the explanatory variable and the response variable.
REFERENCES:
patent: 2003/0204348 (2003-10-01), Suzuki et al.
patent: 2006/0047454 (2006-03-01), Tamaki et al.
patent: 2001167996 (2001-06-01), None
patent: 2004-031929 (2004-01-01), None
Translation of JP 2001-167996 is attached (or submitted with this office action).
Ina Hideki
Oishi Satoru
Asfaw Mesfin T
Canon Kabushiki Kaisha
Cowan Liebowitz & Latman P.C.
Glick Edward J
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