Apparatus and method for scanning capacitance microscopy and...

Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;... – Scanning capacitance microscopy or apparatus therefor – e.g.,...

Reexamination Certificate

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C850S021000, C850S033000, C250S306000, C250S307000, C324S724000, C977S866000

Reexamination Certificate

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07856665

ABSTRACT:
An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described.

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