Apparatus and method for reducing topographical effects in an au

Details Apparatus and method for reducing topographical effects in an au Apparatus and method for reducing topographical effects in an au

1983-05-31

1987-01-20

Lall, Parshotam S.

Boots, shoes, and leggings

250305, 364498, H01J 3900

Patent

active

046384464

ABSTRACT:
A system for producing an Auger image which is substantially independent of the topographical contour of the sample surface includes at least two counting means. Preferably, the two counting means are adapted to be dedicated counters, one for background incidents and one for signal incidents. The system also includes counter control means for regulating the counting time and the immersion incident energy threshold for each counter.

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patent: 4491926 (1985-01-01), Okada et al.
Janssen et al., "A Ratio Technique for Micro-Auger Analysis", Surface Science, 62 (1977) pp. 277-291.
Browning et al, "A Digital Scanning Auger Electron Microscope", Surface Science, 68 (Nov. 1977) pp. 328-337.

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