Apparatus and method for proof of outgassing products

Details Apparatus and method for proof of outgassing products Apparatus and method for proof of outgassing products

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S458100, C250S461100, C355S053000, C355S072000, C438S016000

Reexamination Certificate

active

07078709

ABSTRACT:
Outgassing products, which are formed during the exposure of photoresist systems by laser irradiation, are adsorbed on a proof plate for further analysis.

REFERENCES:
patent: 6369887 (2002-04-01), Eyolfson et al.
patent: 6555825 (2003-04-01), Mitchell et al.
patent: 2002/0030801 (2002-03-01), Endo et al.
patent: 2005/0079438 (2005-04-01), Cao et al.

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