Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-08-15
1989-08-29
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156646, 156345, 20419233, 204298, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
048614190
ABSTRACT:
Operations of a plasma etch reactor (10) are monitored to detect aberrations in etching operations. A reference end point trace is defined (62) for the etch process. Regions are defined in the reference end point trace (70) with aid of a dynamic time warping matching function (84) and characteristics and tolerances for each region are defined (72-80). The etcher is run and an actual end point trace is obtained (82) from the running of the etcher. A warping function is constructed (88) between the actual trace and the reference trace. In building the warping function, candidate path segments (100) are constructed according to a minimum cumulative cost function (96). Once the regions of the reference trace and the actual trace has been matched according to an optimum dynamic time warping function path (106), characteristics of the matched regions are compared (66) to determine whether aberrations have occurred during the etch process. In an alternative embodiment, the actual trace (164) is matched to each of a library of reference traces (162,182) by dynamic time warping (166). By determining the best match, a determination can be made whether the actual trace is abnormal (174) or normal (176), and the type of abnormality.
REFERENCES:
patent: 4493745 (1985-01-01), Chen et al.
patent: 4615761 (1986-10-01), Tada et al.
patent: 4657620 (1987-04-01), Davis et al.
Dolins Steven B.
Flinchbaugh Bruce E.
Reese Jon
Srivastava Aditya
Bassuk Lawrence J.
Comfort James T.
Powell William A.
Sharp Melvin P.
Texas Instruments Incorporated
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