Metal working – Barrier layer or semiconductor device making
Patent
1997-06-25
2000-08-22
Graybill, David E.
Metal working
Barrier layer or semiconductor device making
414936, 414938, 414939, 414940, 414941, H01L 2100, H01L 2164, B65G 4907
Patent
active
06106582&
ABSTRACT:
An apparatus for positioning an object at multiple positions within an enclosure has a moveable positioning member attached to a linear motor, both of which are positioned within the enclosure. The moveable positioning member is adapted to receive and support the object. A control signal directs the motion of the linear motor which moves the moveable positioning member and, thus, the object. An insulated conductor extends through the wall of the enclosure and allows electrical communication through the enclosure wall. The insulated conductor communicates with a power supply and a control mechanism exterior the enclosure. A flexible connection line, adapted to avoid contact with the enclosure, provides communication between an insulated conductor and the linear motor so that the linear motor is in communication with the power supply and the control mechanism.
REFERENCES:
patent: 4664578 (1987-05-01), Kakehi
patent: 5148714 (1992-09-01), McDiarmid
patent: 5674039 (1997-10-01), Walker et al.
patent: 5697750 (1997-12-01), Fishkin et al.
patent: 5833426 (1998-11-01), Marohl
Brezoczky Thomas
Heyder Roger
Manoharlal Deepak
Applied Materials Inc.
Graybill David E.
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